dLibra Digital Library - Firek, Piotr; Werbowy, Aleksander; Szmidt, Jan; Kwietniewski, Norbert, Influence of the deposition process parameters on electronic properties of BN films obtained by means of RF PACVD, Journal of Telecommunications and Information Technology, 2007, nr 3

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Firek, Piotr; Werbowy, Aleksander; Szmidt, Jan; Kwietniewski, Norbert, Influence of the deposition process parameters on electronic properties of BN films obtained by means of RF PACVD, Journal of Telecommunications and Information Technology, 2007, nr 3

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