Biblioteka Cyfrowa

Mroczyński, Robert; Bieniek, Tomasz; Beck, Romuald B.; Ćwil, Michał; Konarski, Piotr; Hoffmann, Patrick; Schmeißer, Dieter, Comparison of composition of ultra-thin silicon oxynitride layers’ fabricated by PECVD and ultrashallow rf plasma ion implantation, Journal of Telecommunications and Infor...