Biblioteka Cyfrowa

Bieniek, Tomasz; Beck, Romuald B.; Jakubowski, Andrzej; Konarski, Piotr; Ćwil, Michał; Hoffmann, Patrick; Schmeißer, Dieter, Composition and electrical properties of ultra-thin SiOxNy layers formed by rf plasma nitrogen implantation/plasma oxidation processes, Journal of Telecommunications and ...