Biblioteka Cyfrowa
Opis wydania
Performance and operation of stressed dual gap RF MEMS varactors, Journal of Telecommunications and Information Technology, 2007, nr 1
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Opis :
The design, fabrication and measurement of a con- tinuously tunable RF MEMS capacitor is described. The capacitor’s dual gap height architecture allows for electro- static tuning with low resistive loss and a large tuning range. A new dual tuning scheme is introduced for use with two voltage sources. This dual tuning, coupled with a stress-induced bridge, is used to reach further device tuning. Measurements indicate a continuously tunable capacitance range of 6.2:1 with a quality factor over 50 at 30 GHz for 310 fF.
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